A Phase Field Model for Grain Growth and Thermal Grooving in Thin Films with Orientation Dependent Surface Energy

نویسندگان

  • Nele Moelans
  • Bart Blanpain
  • Patrick Wollants
چکیده

Abstract. A phase field model for simulating grain growth and thermal grooving in thin films is presented. Orientation dependence of the surface free energy and misorientation dependence of the grain boundary free energy are included in the model. Moreover, the model can treat different mechanisms for groove formation, namely through volume diffusion, surface diffusion, evaporation-condensation, or a combination of these mechanisms. The evolution of a groove between two grains has been simulated for different surface and grain boundary energies and different groove formation mechanisms.

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تاریخ انتشار 2007